Micro/Nanolithography is a creation of micro/nano features on the substrate. This paper proposes a new capillary-based lithography method that is non-invasive to substrate. The application of the pressure from one side of capillary causes the liquid meniscus to form at the capillary outlet. Touching the substrate with the meniscus only causes the liquid deposition on the substrate. The size of deposited liquid droplet is about 10% of inner diameter of the capillary. Glycerol was chosen as a trial liquid of deposition, because the rate of evaporation for glycerol is low in comparison with other liquids. The deposition of glycerol was done in micro-scale. Comparison of theoretical results with experimental data is shown and discussed.
- Fluids Engineering Division
Liquid Deposition at Micro and Nanoscale
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Lutfurakhmanov, A, Sailer, R, Loken, G, Kohut, A, Wang, Y, Voronov, A, Schulz, DL, & Akhatov, IS. "Liquid Deposition at Micro and Nanoscale." Proceedings of the ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels collocated with 3rd Joint US-European Fluids Engineering Summer Meeting. ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels: Parts A and B. Montreal, Quebec, Canada. August 1–5, 2010. pp. 799-804. ASME. https://doi.org/10.1115/FEDSM-ICNMM2010-30801
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