The dynamics response optimization of an ultra-precision machine tool system is the key to improve machining accuracy. Based on the transfer matrix method for multibody systems (MSTMM), the dynamics model as multi-rigid-flexible-body system is established. The overall transfer equation, overall transfer matrix, eigenfrequency equation and dynamics equation with respect to generalized coordinates are derived in this paper. Considering the environmental micro-vibration, cutting force and spindle centrifugal force during the machining process as external excitations, the vibration characteristics and dynamics response are simulated by using MSTMM. The computational results are in good agreement with test results, which validates the proposed method and dynamics model used in this paper.

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