Abstract

Meso-scale electromagnetic actuators in low-temperature co-fired ceramic (LTCC) tapes were fabricated, tested, and analyzed. Two types of designs were considered: a NdFeB permanent magnet bonded to Kapton (polyimide film material from Du Pont) beam and a permalloy (soft magnetic material) beam. In both cases, electromagnetic coils printed on ceramic tapes were used for actuation. The beam deflection was measured as a function of applied current. In the case of the permanent magnet actuator, the experimental observations were compared with theoretical predictions.

Volume Subject Area:
Microelectromechanical Systems
Topics:
Ceramics, Electromagnetic actuators, Low temperature, Permanent magnets, Actuators, Deflection, Magnetic materials
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Copyright © 1999 by The American Society of Mechanical Engineers
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