Search Results | IMECE | ASME Digital Collection

1-20 of 32

Sort by

Sort Order Select

Proceedings Papers

MEMS for Fluidic Controls

Chih-Ming Ho, Yu-Chong Tai

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 27, November 16–21, 1997

Paper No: IMECE1997-0934

DOI: https://doi.org/10.1115/IMECE1997-0934

View Paper

Topics: Microelectromechanical systems, Sensors, Actuators, Circuits, Shear stress, Transducers, Computers, Integrated circuit fabrication, Micromachining, Artificial neural networks

Proceedings Papers

Noncontact Physical Removal of Nano-Scale Particles From Surfaces

Ahmed A. Busnaina, Hong Lin

Proc. ASME. IMECE2001, Micro-Electro-Mechanical Systems (MEMS), 827-830, November 11–16, 2001

Paper No: IMECE2001/MEMS-23918

DOI: https://doi.org/10.1115/IMECE2001/MEMS-23918

View Paper

Topics: Acoustics, Microelectromechanical systems, Nanoscale phenomena, Particulate matter, Fluctuations (Physics), Integrated circuit fabrication, Nanoparticles, Pressure, Semiconductor wafers, Semiconductors (Materials)

Proceedings Papers

Implementation of Observer-Corrector Feedback for Motion Control of Direct-Drive Robotic Manipulator

Martin Hosek, Jairo T. Moura, Hakan Elmali

Proc. ASME. IMECE2001, Dynamic Systems and Control, 899-906, November 11–16, 2001

Paper No: IMECE2001/DSC-24612

DOI: https://doi.org/10.1115/IMECE2001/DSC-24612

View Paper

Topics: Feedback, Manipulators, Motion control, Dynamics (Mechanics), Signals, Control equipment, Control systems, Integrated circuit fabrication, Low-pass filters, Resonance

Proceedings Papers

Alternative Compliant Interconnects: Thermo-Mechanical Reliability, Design and Testing

Lunyu Ma, Qi Zhu, Suresh Sitaraman

Proc. ASME. IMECE2001, Packaging, Reliability and Manufacturing Issues Associated With Electronic and Photonic Products, 33-42, November 11–16, 2001

Paper No: IMECE2001/EPP-24704

DOI: https://doi.org/10.1115/IMECE2001/EPP-24704

View Paper

Topics: Design, Reliability, Testing, Thermomechanics, Springs, Density, Electronic packages, Integrated circuit fabrication, Manufacturing, Packaging

Proceedings Papers

Silicon Micromachined Ultrasonic Transducers

Butrus T. Khuri-Yakub, Ching-Hsiang Cheng, Fahrettin-Levent Degertekin, Sanli Ergun, Sean Hansen, Xue-Cheng Jin, Omer Oralkan

Proc. ASME. IMECE2000, Noise Control and Acoustics, 153-171, November 5–10, 2000

Paper No: IMECE2000-1602

DOI: https://doi.org/10.1115/IMECE2000-1602

View Paper

Topics: Micromachining, Silicon, Ultrasonic transducers, Transducers, Capacitors, Piezoelectric transducers, Design, Dimensions, Integrated circuit fabrication, Ultrasonic applications

Proceedings Papers

Smart Giant Magnetostriction Actuator With Self-Sensing and Thermal Compensation Capability

Yoshio Yamamoto, Takaaki Makino, Hiro Matsui

Proc. ASME. IMECE2000, Manufacturing Engineering, 195-200, November 5–10, 2000

Paper No: IMECE2000-1807

DOI: https://doi.org/10.1115/IMECE2000-1807

View Paper

Topics: Actuators, Magnetostriction, Wire, Density, Design, Fatigue, Heat, Integrated circuit fabrication, Joules, Solenoids

Proceedings Papers

A Novel Framework of Lightweight Optimization Design of a Prototype Wafer Stage With Control Verification

Yujie Li, Ming Zhang, Yu Zhu, Xin Li, Leijie Wang

Proc. ASME. IMECE2019, Volume 4: Dynamics, Vibration, and Control, V004T05A019, November 11–14, 2019

Paper No: IMECE2019-10896

DOI: https://doi.org/10.1115/IMECE2019-10896

View Paper

Topics: Design, Engineering prototypes, Optimization, Semiconductor wafers, Motors, Artificial neural networks, Errors, Finite element methods, Servomechanisms, Control equipment

Proceedings Papers

A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage

Min Li, Yu Zhu, Kaiming Yang, Chuxiong Hu, Haihua Mu

Proc. ASME. IMECE2016, Volume 4B: Dynamics, Vibration, and Control, V04BT05A037, November 11–17, 2016

Paper No: IMECE2016-66324

DOI: https://doi.org/10.1115/IMECE2016-66324

View Paper

Topics: Semiconductor wafers, Sliding mode control, Errors, Integrated circuit fabrication, Motion control, Nanoscale phenomena, Noise (Sound), Robustness, Steady state, Tradeoffs

Proceedings Papers

The Effect of Strain on the Electronic Properties of Graphene Nanoribbons

Meng Yang, Masato Ohnishi, Ken Suzuki, Hideo Miura

Proc. ASME. IMECE2014, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T13A020, November 14–20, 2014

Paper No: IMECE2014-39635

DOI: https://doi.org/10.1115/IMECE2014-39635

View Paper

Topics: Graphene, Deformation, Energy gap, Electrical conductivity, Stress, Tension, Thermal conductivity, Approximation, Density functional theory, Electron configuration

Proceedings Papers

Contactless Superconducting Magnetic Instrument for Precise Positioning in Cryogenic Environments

J. L. Perez-Diaz, I. Valiente-Blanco, E. Diez-Jimenez, J. Sanchez-Garcia-Casarrubios, M. A. Alvarez-Valenzuela, C. Cristache, J. Serrano, F. Romera-Juarez, D. Gonzalez-de-Maria, M. Lamesans, H. Argelaguet-Vilaseca

Proc. ASME. IMECE2013, Volume 10: Micro- and Nano-Systems Engineering and Packaging, V010T11A064, November 15–21, 2013

Paper No: IMECE2013-63742

DOI: https://doi.org/10.1115/IMECE2013-63742

View Paper

Topics: Biomedicine, Coordinate measuring machines, Cryogenics, Disks, Energy consumption, Imaging, Inspection, Integrated circuit fabrication, Interferometers, Inventions

Proceedings Papers

A Study on the Internal Thermal Problems for Low Temperature Furnace in Semiconductor Processing

Kang-Woo Joo, Duwon Jeong, Mason Suh, Kwang-Sun Kim

Proc. ASME. IMECE2012, Volume 7: Fluids and Heat Transfer, Parts A, B, C, and D, 3061-3066, November 9–15, 2012

Paper No: IMECE2012-87205

DOI: https://doi.org/10.1115/IMECE2012-87205

View Paper

Topics: Furnaces, Low temperature, Semiconductors (Materials), Semiconductor wafers, Temperature, Heat treating (Metalworking), Temperature distribution, Design, Manufacturing, Computational fluid dynamics

Proceedings Papers

A Study on the Fluid Flow for Effective Polishing Process in CMP Equipment

Kang-Woo Joo, Suyeon Lee, Jiyoung Hwang, Kwang-Sun Kim

Proc. ASME. IMECE2012, Volume 5: Education and Globalization; General Topics, 551-555, November 9–15, 2012

Paper No: IMECE2012-87213

DOI: https://doi.org/10.1115/IMECE2012-87213

View Paper

Topics: Fluid dynamics, Polishing, Slurries, Nozzles, Semiconductor wafers, Density, Electrical wires, Flow (Dynamics), Integrated circuit fabrication, Metals

Proceedings Papers

Micro-Scale Thermal Sensor Manufacturing for Semiconductor Furnace Chamber

Hongcheon Yang, Jun Young Kim, Kwang-Sun Kim

Proc. ASME. IMECE2012, Volume 5: Education and Globalization; General Topics, 557-563, November 9–15, 2012

Paper No: IMECE2012-87223

DOI: https://doi.org/10.1115/IMECE2012-87223

View Paper

Topics: Furnaces, Manufacturing, Microscale devices, Semiconductors (Materials), Sensors, Semiconductor wafers, Temperature, Thermocouples, Semiconductor devices, Wire

Proceedings Papers

On Determination of Sample Size to Evaluate Reliability Growth Plans

X. Jin, P. Woytowitz, T. Tan

Proc. ASME. IMECE2011, Volume 9: Transportation Systems; Safety Engineering, Risk Analysis and Reliability Methods; Applied Stochastic Optimization, Uncertainty and Probability, 451-456, November 11–17, 2011

Paper No: IMECE2011-62189

DOI: https://doi.org/10.1115/IMECE2011-62189

View Paper

Topics: Reliability, Errors, Integrated circuit fabrication, Statistics

Proceedings Papers

Investigation of Magnetic Abrasive Finishing for Internal Polishing of Aluminium Tubes Using DOE

Alireza Fadaei Tehrani, Mehrdad Givi, Ashkan Sepehr Afghan

Proc. ASME. IMECE2010, Volume 3: Design and Manufacturing, Parts A and B, 963-968, November 12–18, 2010

Paper No: IMECE2010-38811

DOI: https://doi.org/10.1115/IMECE2010-38811

View Paper

Topics: Aluminum, Finishing, Polishing, Abrasives, Aerospace industry, Aluminum tube, Biomedicine, Cycles, Experimental design, Integrated circuit fabrication

Proceedings Papers

Positioning Repeatability of Robotic Systems With Synchronous Belt Drives

Martin Hosek, Jay Krishnasamy, Stuart Beale

Proc. ASME. IMECE2009, Volume 10: Mechanical Systems and Control, Parts A and B, 17-26, November 13–19, 2009

Paper No: IMECE2009-10111

DOI: https://doi.org/10.1115/IMECE2009-10111

View Paper

Topics: Robotics, Timing belts, Robots, Belts, Design, End effectors, Integrated circuit fabrication, Motors

Proceedings Papers

Study on Model Predictive Control to Minimize Temperature Change of Vertical Plate With Varying Heat Generation

Shigeki Hirasawa, Shinya Ito, Kazuya Koike

Proc. ASME. IMECE2009, Volume 9: Heat Transfer, Fluid Flows, and Thermal Systems, Parts A, B and C, 7-13, November 13–19, 2009

Paper No: IMECE2009-10206

DOI: https://doi.org/10.1115/IMECE2009-10206

View Paper

Topics: Heat, Predictive control, Temperature, Vertical plates, Feedback, Noise (Sound), Temperature control, Feedforward control, Heat conduction, Integrated circuit fabrication

Proceedings Papers

Models for Component Selection and Thermo-Mechanical Reliability Trade-Offs to Address Component Obsolescence in Military Electronics

Pradeep Lall, Aniket Shirgaokar, Jeffrey Suhling

Proc. ASME. IMECE2008, Volume 6: Electronics and Photonics, 245-261, October 31–November 6, 2008

Paper No: IMECE2008-68274

DOI: https://doi.org/10.1115/IMECE2008-68274

View Paper

Topics: Electronics, Military systems, Reliability, Thermomechanics, Tradeoffs, Ball-Grid-Array packages, Alloys, Architecture, Regression models, Ceramics

Proceedings Papers

Design Optimization of an Actuation Mechanism for a Dual-Arm Robotic Manipulator

Jay Krishnasamy, Martin Hosek

Proc. ASME. IMECE2007, Volume 9: Mechanical Systems and Control, Parts A, B, and C, 1247-1256, November 11–15, 2007

Paper No: IMECE2007-41577

DOI: https://doi.org/10.1115/IMECE2007-41577

View Paper

Topics: Design, Manipulators, Optimization, Engines, Motors, Kinematics, Resolution (Optics), Semiconductor wafers, Torque, Vacuum

Proceedings Papers

Sliding-Mode Control Algorithm for a Hard-Mounted Isolation System

Yung-Peng Wang, Jen-Chieh Tsao

Proc. ASME. IMECE2007, Volume 9: Mechanical Systems and Control, Parts A, B, and C, 2003-2008, November 11–15, 2007

Paper No: IMECE2007-43207

DOI: https://doi.org/10.1115/IMECE2007-43207

View Paper

Topics: Control algorithms, Vibration control, Vibration isolation, Vibration, Resonance, Computer simulation, Integrated circuit fabrication, Machining, Microelectromechanical systems, Nanotechnology

NARROW

MEMS for Fluidic Controls

Noncontact Physical Removal of Nano-Scale Particles From Surfaces

Implementation of Observer-Corrector Feedback for Motion Control of Direct-Drive Robotic Manipulator

Alternative Compliant Interconnects: Thermo-Mechanical Reliability, Design and Testing

Silicon Micromachined Ultrasonic Transducers

Smart Giant Magnetostriction Actuator With Self-Sensing and Thermal Compensation Capability

A Novel Framework of Lightweight Optimization Design of a Prototype Wafer Stage With Control Verification

A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage

The Effect of Strain on the Electronic Properties of Graphene Nanoribbons

Contactless Superconducting Magnetic Instrument for Precise Positioning in Cryogenic Environments

A Study on the Internal Thermal Problems for Low Temperature Furnace in Semiconductor Processing

A Study on the Fluid Flow for Effective Polishing Process in CMP Equipment

Micro-Scale Thermal Sensor Manufacturing for Semiconductor Furnace Chamber

On Determination of Sample Size to Evaluate Reliability Growth Plans

Investigation of Magnetic Abrasive Finishing for Internal Polishing of Aluminium Tubes Using DOE

Positioning Repeatability of Robotic Systems With Synchronous Belt Drives

Study on Model Predictive Control to Minimize Temperature Change of Vertical Plate With Varying Heat Generation

Models for Component Selection and Thermo-Mechanical Reliability Trade-Offs to Address Component Obsolescence in Military Electronics

Design Optimization of an Actuation Mechanism for a Dual-Arm Robotic Manipulator

Sliding-Mode Control Algorithm for a Hard-Mounted Isolation System

Journals

Conference Proceedings

eBooks

Resources

Opportunities

Journals

Conference Proceedings

eBooks

Resources

Opportunities

This Feature Is Available To Subscribers Only