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Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997

Paper No: IMECE1997-0950

DOI: https://doi.org/10.1115/IMECE1997-0950

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Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes

Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997

Paper No: IMECE1997-0932

DOI: https://doi.org/10.1115/IMECE1997-0932

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Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing

Proceedings Papers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Si Young Kim, Jeung Sang Go, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 21-26, November 16–21, 1997

Paper No: IMECE1997-0933

DOI: https://doi.org/10.1115/IMECE1997-0933

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Topics: Design, Manufacturing, Resonance, Accelerometers, Micromachining, Polysilicon, Stress, Annealing, Deflection, Mechanical structures

Proceedings Papers

Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass

Jong Soo Ko, Young-Ho Cho, Byung Man Kwak, Kwanhum Park

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 353-356, November 15–20, 1998

Paper No: IMECE1998-1267

DOI: https://doi.org/10.1115/IMECE1998-1267

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Topics: Cantilevers, Design, Manufacturing, Accelerometers, Microfabrication, Cantilever beams, Mass production, Resonance, Sawing, Semiconductor wafers

Proceedings Papers

Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns

Glenn E. Spangler

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 215-222, November 15–20, 1998

Paper No: IMECE1998-1245

DOI: https://doi.org/10.1115/IMECE1998-1245

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Topics: Microfabrication, Diffusion (Physics), Flow (Dynamics), Gas chromatography, Pressure, Resolution (Optics)

Proceedings Papers

Microfluidics of a Planar Microfabricated Fluid Filter

Yit-shun Leung Ki, Didier Maillefer, Gilles Rey-Mermet, Peter A. Monkewitz, Philippe Renaud, Harald T. G. van Lintel

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 165-170, November 15–20, 1998

Paper No: IMECE1998-1238

DOI: https://doi.org/10.1115/IMECE1998-1238

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Topics: Filters, Fluids, Microfabrication, Microfluidics, Design, Filtration, Flow (Dynamics), Micromachining, Pumps, Silicon

Proceedings Papers

Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays

Vanessa M. Kenning, Charles J. Call, Patrick T. Call, Joseph G. Birmingham

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 111-116, November 15–20, 1998

Paper No: IMECE1998-1230

DOI: https://doi.org/10.1115/IMECE1998-1230

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Topics: Bacteria, Micromachining, Particulate matter, Flow (Dynamics), Surface roughness, Turbulence, Computational fluid dynamics, Design, Engineering simulation, Inertia (Mechanics)

Proceedings Papers

Artificial Micropatterns of Cells on Biocompatible Surfaces

Albert Folch, Mehmet Toner

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 27-30, November 15–20, 1998

Paper No: IMECE1998-1219

DOI: https://doi.org/10.1115/IMECE1998-1219

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Topics: Biocompatibility, Silicon, Adhesion, Assaying, Biological tissues, Biosensors, Microfabrication, Microscale devices, Polymers, Self-assembly

Proceedings Papers

Multi-Chamber, Real-Time DNA Analysis in the Field Using Microfabricated Silicon Chambers

P. Belgrader, W. Benett, R. Frattaroli, D. Hadley, R. Langlois, S. Lehew, R. Mariella, Jr., F. Milanovich, S. Nasarabadi, M. A. Northrup, J. Richards, P. Stratton, K. S. Venkateswaran, G. Long, W. Nelson

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 279-283, November 15–20, 1998

Paper No: IMECE1998-1255

DOI: https://doi.org/10.1115/IMECE1998-1255

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Topics: DNA, Microfabrication, Silicon, Emissions, Probes, Chain, Computer software, Cooling, Cycles, Design

Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998

Paper No: IMECE1998-1265

DOI: https://doi.org/10.1115/IMECE1998-1265

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Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes

Proceedings Papers

Fluid Transport Mechanisms in Microfluidic Devices

Joshua I. Molho, Amy E. Herr, Thomas W. Kenny, M. Godfrey Mungal, Manish Deshpande, John R. Gilbert, Michael G. Garguilo, Phillip H. Paul, Pamela M. St. John, Timothy M. Woudenberg, Charles Connell

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 69-76, November 15–20, 1998

Paper No: IMECE1998-1224

DOI: https://doi.org/10.1115/IMECE1998-1224

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Topics: Fluids, Microfluidics, Flow (Dynamics), Pressure gradient, Electrokinetics, Imaging, Microfabrication, Pressure

Proceedings Papers

Development of a Three-Component Micro Force Sensor/Calibration Device

W. L. Jin, C. D. Mote, Jr.

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 11-17, November 15–20, 1998

Paper No: IMECE1998-1217

DOI: https://doi.org/10.1115/IMECE1998-1217

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Topics: Calibration, Force sensors, Microfabrication, Strain gages

Proceedings Papers

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

Junghoon Lee, Chang-Jin “CJ” Kim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 475-480, November 15–20, 1998

Paper No: IMECE1998-1287

DOI: https://doi.org/10.1115/IMECE1998-1287

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Topics: Reactive-ion etching, Silicon, Electrolytes, Liquid metals, Microchannels, Microelectromechanical systems, Microscale devices, Slug flows, Surface tension, Design

Proceedings Papers

A Domain Decomposition Algorithm for Thermal Analysis in X-Ray Lithography With Cylindrical Geometry

Weizhong Dai, Raja Nassar

Proc. ASME. IMECE98, Fluids Engineering, 95-100, November 15–20, 1998

Paper No: IMECE1998-0991

DOI: https://doi.org/10.1115/IMECE1998-0991

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Topics: Algorithms, Geometry, Thermal analysis, X-ray lithography, Photoresists, X-rays, Irradiation (Radiation exposure), Linear systems, Microfabrication, Numerical analysis

Proceedings Papers

Design and Evaluation of Microfabricated Acoustical Lenses for High Frequency Ultrasound Applications

Jinghong Li, Robert S. Keynton, Craig R. Friedrich

Proc. ASME. IMECE98, Advances in Bioengineering, 363-364, November 15–20, 1998

Paper No: IMECE1998-0175

DOI: https://doi.org/10.1115/IMECE1998-0175

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Topics: Acoustics, Design, Microfabrication, Ultrasonic applications, Epoxy adhesives, Epoxy resins, Jigs and fixtures, Lenses (Optics), Crystals, Dimensions

Proceedings Papers

Structure and Behavior of Materials for Micromechanical Devices

Peter Krulevitch, Kirk P. Seward, Harold D. Ackler, George C. Johnson, Roger T. Howe

Proc. ASME. IMECE98, Mechanical Behavior of Advanced Materials, 131-133, November 15–20, 1998

Paper No: IMECE1998-1146

DOI: https://doi.org/10.1115/IMECE1998-1146

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Topics: Buckling, Crystallization, Electron microscopy, Etching, Fatigue, Film thickness, Fracture (Materials), Fracture (Process), Mechanical behavior, Microactuators

Proceedings Papers

Integrated Mesoscopic Cooler Circuits (IMCCs)

Mark A. Shannon, Mike L. Philpott, Norman R. Miller, Clark W. Bullard, David J. Beebe, Anthony M. Jacobi, Predag S. Hrnjak, Taher Saif, Narayan Aluru, Huseyin Sehitoglu, Angus Rockett, James Economy

Proc. ASME. IMECE99, Advanced Energy Systems, 75-82, November 14–19, 1999

Paper No: IMECE1999-0812

DOI: https://doi.org/10.1115/IMECE1999-0812

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Topics: Circuits, Mesoscopic systems, Compression, Cooling, Manufacturing, Refrigeration, Vapors, Biomedicine, Composite materials, Cycles

Proceedings Papers

Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation

Timothy Moulton, G. K. Ananthasuresh

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 553-560, November 14–19, 1999

Paper No: IMECE1999-0320

DOI: https://doi.org/10.1115/IMECE1999-0320

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Topics: Blocks (Building materials), Design, Microelectromechanical systems, Microfabrication, Micromachining, Micromechanical devices, Silicon-on-insulator

Proceedings Papers

Implementation and Analysis of Polymeric Replication by Micro-Injection Molding

Jatan Shah, Yu-Chuan Su, Liwei Lin

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 295-301, November 14–19, 1999

Paper No: IMECE1999-0283

DOI: https://doi.org/10.1115/IMECE1999-0283

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Topics: Molding, Injection molding, Microelectromechanical systems, Cavities, Cycles, Manufacturing, Microfabrication, Optimization, Polymer melts, Process control

Proceedings Papers

Infrared Vision Using an Uncooled Thermo-Opto-Mechanical Camera: Design, Microfabrication, and Performance

M. Mao, T. Perazzo, O. Kwon, Y. Zhao, A. Majumdar, J. Varesi, P. Norton

Proc. ASME. IMECE99, Micro-Electro-Mechanical Systems (MEMS), 309-316, November 14–19, 1999

Paper No: IMECE1999-0285

DOI: https://doi.org/10.1115/IMECE1999-0285

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Topics: Design, Microfabrication, Cantilevers, Temperature, Absorption, Cantilever beams, Electrical conductance, Thermomechanics, Adhesion, Cavities

2 3 4 5

NARROW

A Triangular Frequency-Tuning Comb Array

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass

Modification of Golay’s Theory for Rectangular Microfabricated Gas Chromatographic Columns

Microfluidics of a Planar Microfabricated Fluid Filter

Collection of Airborne Bacteria With Micro-Machined Virtual Impactor Arrays

Artificial Micropatterns of Cells on Biocompatible Surfaces

Multi-Chamber, Real-Time DNA Analysis in the Field Using Microfabricated Silicon Chambers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Fluid Transport Mechanisms in Microfluidic Devices

Development of a Three-Component Micro Force Sensor/Calibration Device

Microactuation by Continuous Electrowetting Phenomenon and Silicon Deep RIE Process

A Domain Decomposition Algorithm for Thermal Analysis in X-Ray Lithography With Cylindrical Geometry

Design and Evaluation of Microfabricated Acoustical Lenses for High Frequency Ultrasound Applications

Structure and Behavior of Materials for Micromechanical Devices

Integrated Mesoscopic Cooler Circuits (IMCCs)

Micromechanical Devices With Embedded Electro-Thermal-Compliant Actuation

Implementation and Analysis of Polymeric Replication by Micro-Injection Molding

Infrared Vision Using an Uncooled Thermo-Opto-Mechanical Camera: Design, Microfabrication, and Performance

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