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Proceedings Papers

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997
Paper No: IMECE1997-0950
Proceedings Papers

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 11-17, November 15–20, 1998
Paper No: IMECE1998-1217