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Journal Articles

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Chu Rainer Kwang-Hua

J. Dyn. Sys., Meas., Control. September 2020, 142(9): 094502.

Paper No: DS-19-1164

DOI: https://doi.org/10.1115/1.4047012

Published Online: May 11, 2020

View Article titled, Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Topics: Cantilevers, Damping, Fluids, Microelectromechanical systems, Pressure, Q-factor, Knudsen number, Energy dissipation, Resonance, Semiconductor wafers

Journal Articles

Nonlinear Models for Magnet Placement in Individually Actuated Magnetic Cilia Devices

Nathan Banka, Santosh Devasia

J. Dyn. Sys., Meas., Control. June 2018, 140(6): 061011.

Paper No: DS-17-1233

DOI: https://doi.org/10.1115/1.4038534

Published Online: December 22, 2017

View Article titled, Nonlinear Models for Magnet Placement in Individually Actuated Magnetic Cilia Devices

Topics: Cantilevers, Deflection, Electromagnets, Magnetic fields, Magnets, Modeling, Fittings, Stress

Journal Articles

Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

Dumitru I. Caruntu, Martin W. Knecht

J. Dyn. Sys., Meas., Control. April 2015, 137(4): 041016.

Paper No: DS-12-1363

DOI: https://doi.org/10.1115/1.4028887

Published Online: April 1, 2015

View Article titled, Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

Topics: Cantilevers, Microelectromechanical systems, Steady state, Frequency response, Casimir force, Damping

Journal Articles

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Georg E. Fantner, Daniel J. Burns, Angela M. Belcher, Ivo W. Rangelow, Kamal Youcef-Toumi

J. Dyn. Sys., Meas., Control. November 2009, 131(6): 061104.

DOI: https://doi.org/10.1115/1.4000378

Published Online: November 6, 2009

View Article titled, DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

Topics: Actuators, Atomic force microscopy, Cantilevers, Deflection, Imaging

Journal Articles

DMCMN: Experimental/Analytical Evaluation of the Effect of Tip Mass on Atomic Force Microscope Cantilever Calibration

Matthew S. Allen, Hartono Sumali, Peter C. Penegor

J. Dyn. Sys., Meas., Control. November 2009, 131(6): 064501.

DOI: https://doi.org/10.1115/1.4000160

Published Online: October 30, 2009

View Article titled, DMCMN: Experimental/Analytical Evaluation of the Effect of Tip Mass on Atomic Force Microscope Cantilever Calibration

Topics: Atomic force microscopy, Calibration, Cantilevers, Probes, Errors, Elastic constants, Mode shapes, Stiffness, Density

Journal Articles

Heterodyne Digital Control of a High-Frequency Micromechanical Oscillator

Thomas E. Kriewall, Joseph L. Garbini, John A. Sidles, Jonathan P. Jacky

J. Dyn. Sys., Meas., Control. September 2006, 128(3): 577–583.

DOI: https://doi.org/10.1115/1.2229258

Published Online: October 23, 2005

View Article titled, Heterodyne Digital Control of a High-Frequency Micromechanical Oscillator

Topics: Cantilevers, Control equipment, Signals, Noise (Sound), Hardware, Feedback

Journal Articles

A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements

Mariateresa Napoli, Bassam Bamieh, Kimberly Turner

J. Dyn. Sys., Meas., Control. June 2004, 126(2): 319–326.

DOI: https://doi.org/10.1115/1.1767851

Published Online: August 5, 2004

View Article titled, A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements

Topics: Cantilevers, Resonance, Signals, Excitation, Dynamics (Mechanics), Design, Differential equations

Journal Articles

Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams

P. Ruther, W. Bacher, K. Feit, D. Maas, W. Menz

J. Dyn. Sys., Meas., Control. March 1997, 119(1): 57–60.

DOI: https://doi.org/10.1115/1.2801214

Published Online: March 1, 1997

View Article titled, Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams

Topics: Cantilevers, Engineering prototypes, Microbeams, Young's modulus, Actuators, Adhesives, Bonding, Glass, Manganese (Metal), Microactuators

Journal Articles

Vibration Control in Rotating or Translating Elastic Systems

A. Galip Ulsoy

J. Dyn. Sys., Meas., Control. March 1984, 106(1): 6–14.

DOI: https://doi.org/10.1115/1.3149666

Published Online: March 1, 1984

View Article titled, Vibration Control in Rotating or Translating Elastic Systems

Topics: Belts, Cantilevers, Circular saws, Control equipment, Design, Rotation, Simulation results, String, Vibration, Vibration control

Journal citation

NARROW

Microelectromechanical Systems Cantilever Resonators: Pressure-Dependent Gas Film Damping

Nonlinear Models for Magnet Placement in Individually Actuated Magnetic Cilia Devices

Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

DMCMN: Experimental/Analytical Evaluation of the Effect of Tip Mass on Atomic Force Microscope Cantilever Calibration

Heterodyne Digital Control of a High-Frequency Micromechanical Oscillator

A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements

Prototype of a Microtesting System Made by the LIGA Process to Measure the Young’s Modulus in Cantilever Microbeams

Vibration Control in Rotating or Translating Elastic Systems

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