Temperature distribution is the key factor affecting the bonding quality in the glass/glass laser bonding process. In this work, the finite element method was used to establish three-dimensional (3D) numerical analysis model of the temperature field during bonding. Based on the result of the finite element analysis, the crucial parameters and their influences on the temperature distribution were discussed. In order to predetermine the necessary process parameter values for bonding, a nonlinear multiparameter fitting formula was established to predict the maximum temperature. The fitting model was validated experimentally by recording the maximum temperature during laser bonding via an infrared thermal imager.

References

1.
Tao
,
Y.
,
Malshe
,
A. P.
, and
Brown
,
W. D.
,
2004
, “
Selective Bonding and Encapsulation for Wafer-Level Vacuum Packaging of MEMS and Related Micro Systems
,”
Microelectron. Reliab.
,
44
(
2
), pp.
251
258
.
2.
Ribeiro
,
F.
,
Maçaira
,
J.
,
Cruz
,
R.
,
Gabriel
,
J.
,
Andrade
,
L.
, and
Mendes
,
A.
,
2012
, “
Laser Assisted Glass Frit Sealing of Dye-Sensitized Solar Cells
,”
Sol. Energy Mater. Sol. Cells
,
96
, pp.
43
49
.
3.
Honma
,
T.
,
Kamata
,
H.
, and
Tatami
,
J.
,
2013
, “
Influence of Crystallization Inside Glass Frit on Seal Stress in Ceramic Metal Halide Lamps
,”
Ceram. Int.
,
39
(
3
), pp.
2767
2774
.
4.
Bardin
,
F.
,
Kloss
,
S.
,
Wang
,
C.
,
Moore
,
A. J.
,
Jourdain
,
A.
,
De Wolf
,
I.
, and
Hand
,
D. P.
,
2007
, “
Laser Bonding of Glass to Silicon Using Polymer for Microsystems Packaging
,”
J. Microelectromech. Syst.
,
16
(
3
), pp.
571
580
.
5.
Shuja
,
S. Z.
, and
Yilbas
,
B. S.
,
2015
, “
Laser Heating of a Moving Slab: Influence Pulse Intensity Parameter on Temperature and Stress Fields
,”
Opt. Laser Technol.
,
70
, pp.
7
16
.
6.
Zhang
,
R.
,
Cai
,
J.
,
Wang
,
Q.
,
Li
,
J.
,
Hu
,
Y.
,
Du
,
H.
, and
Li
,
L.
,
2014
, “
Thermal Resistance Analysis of Sn-Bi Solder Paste Used as Thermal Interface Material for Power Electronics Applications
,”
ASME J. Electron. Packag.
,
136
(
1
), p.
011012
.
7.
Kang
,
S.
, and
Ume
,
I. C.
,
2014
, “
Comparison of Warpage Measurement Capabilities and Results Obtained by Using Laser and Digital Fringe Projection Methods
,”
ASME J. Electron. Packag.
,
136
(
3
), p.
031007
.
8.
Shi
,
Y.
,
Shen
,
H.
,
Yao
,
Z.
, and
Hu
,
J.
,
2007
, “
An Analytical Model Based on the Similarity in Temperature Distributions in Laser Forming
,”
Opt. Lasers Eng.
,
45
(
1
), pp.
83
87
.
9.
Acherjee
,
B.
,
Kuar
,
A. S.
,
Mitra
,
S.
,
Misra
,
D.
, and
Acharyya
,
S.
,
2012
, “
Experimental Investigation on Laser Transmission Welding of PMMA to ABS Via Response Surface Modeling
,”
Opt. Laser Technol.
,
44
(
5
), pp.
1372
1383
.
10.
Acherjee
,
B.
,
Misra
,
D.
,
Bose
,
D.
, and
Venkadeshwaran
,
K.
,
2009
, “
Prediction of Weld Strength and Seam Width for Laser Transmission Welding of Thermoplastic Using Response Surface Methodology
,”
Opt. Laser Technol.
,
41
(
8
), pp.
956
967
.
11.
Kind
,
H.
,
Gehlen
,
E.
,
Aden
,
M.
,
Olowinsky
,
A.
, and
Gillner
,
A.
,
2014
, “
Laser Glass Frit Sealing for Encapsulation of Vacuum Insulation Glasses
,”
Phys. Procedia
,
56
, pp.
673
680
.
12.
Chen
,
S.
,
Huang
,
J.
,
Xia
,
J.
,
Zhao
,
X.
, and
Lin
,
S.
,
2015
, “
Influence of Processing Parameters on the Characteristics of Stainless Steel/Copper Laser Welding
,”
J. Mater. Process. Technol.
,
222
, pp.
43
51
.
13.
Paczkowska
,
M.
,
2016
, “
The Evaluation of the Influence of Laser Treatment Parameters on the Type of Thermal Effects in the Surface Layer Microstructure of Gray Irons
,”
Opt. Laser Technol.
,
76
, pp.
143
148
.
14.
Liu
,
F. R.
,
Han
,
X. X.
,
Bai
,
N.
,
Zhao
,
J. J.
,
Chen
,
J. M.
, and
Lin
,
X.
,
2014
, “
Numerical Simulation on the Temperature Field Induced by a Nanosecond Pulsed Excimer Laser in the Phase-Change Film
,”
Thin Solid Films
,
551
, pp.
102
109
.
15.
Zeng
,
K.
,
Pal
,
D.
,
Gong
,
H. J.
,
Patil
,
N.
, and
Stucker
,
B.
,
2015
, “
Comparison of 3DSIM Thermal Modelling of Selective Laser Melting Using New Dynamic Meshing Method to ANSYS
,”
Mater. Sci. Technol.
,
31
(
8
), pp.
945
956
.
16.
Wei
,
H.
,
Zhang
,
Y.
,
Tan
,
L.
, and
Zhong
,
Z.
,
2015
, “
Energy Efficiency Evaluation of Hot-Wire Laser Welding Based on Process Characteristic and Power Consumption
,”
J. Cleaner Prod.
,
87
, pp.
255
262
.
17.
Acherjee
,
B.
,
Kuar
,
A. S.
,
Mitra
,
S.
, and
Misra
,
D.
,
2012
, “
Effect of Carbon Black on Temperature Field and Weld Profile During Laser Transmission Welding of Polymers: A FEM Study
,”
Opt. Laser Technol.
,
44
(
3
), pp.
514
521
.
18.
Acherjee
,
B.
,
Kuar
,
A.
,
Mitra
,
S.
, and
Mitra
,
D.
,
2010
, “
Finite Element Simulation of Laser Transmission Welding of Dissimilar Materials Between Polyvinylidene Fluoride and Titanium
,”
Int. J. Eng., Sci. Technol.
,
2
(
4
), pp.
176
186
.
19.
Montgomery
,
D. C.
,
2008
,
Design and Analysis of Experiments
,
Wiley
,
Hoboken, NJ
.
20.
Yih-Fong
,
T.
,
Fu-Chen
,
C.
, and
Chih-Huang
,
C.
,
2015
, “
Multiple Quality Characteristics Optimization of Ball Grid Array Wire Bonding Process
,”
ASME J. Electron. Packag.
,
137
(
4
), p.
041004
.
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