... thin films microfabrication nanobiotechnology nanofabrication nanolithography photolithography proteins silicon sputter deposition tumours antigen detection cancer diagnosis microscale and nanoscale structures Progressive increase in cancer-specific antigen in human serum can...

...-to-substrate interconnect can facilitate wafer-level probing as well as wafer-level packaging without the need for an underfill. The fabrication of the G-Helix interconnect is similar to conventional IC fabrication process and is based on electroplating and photolithography. G-Helix interconnect has good...