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Keywords: photolithography
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Journal Articles
Article Type: Research Papers
J. Electron. Packag. June 2009, 131(2): 021014.
Published Online: April 28, 2009
... thin films microfabrication nanobiotechnology nanofabrication nanolithography photolithography proteins silicon sputter deposition tumours antigen detection cancer diagnosis microscale and nanoscale structures Progressive increase in cancer-specific antigen in human serum can...
Journal Articles
Article Type: Technical Papers
J. Electron. Packag. June 2004, 126(2): 237–246.
Published Online: July 8, 2004
...-to-substrate interconnect can facilitate wafer-level probing as well as wafer-level packaging without the need for an underfill. The fabrication of the G-Helix interconnect is similar to conventional IC fabrication process and is based on electroplating and photolithography. G-Helix interconnect has good...