...Renqiang Xiong In this paper, a bottom-up approach is used to construct random rough bottom walls for trapezoidal silicon microchannels with hydraulic diameters D h from 47 μ m to 241 μ m . The top and side walls are set to be smooth. A computational fluid dynamics solver is used to solve the 3D...

... is applied to a bidirectional silicon flow sensor, that generates two independent signals, both being a function of the Re number and the fluid temperature. This allows both temperature and mass flow measurement by use of a single sensor. Temperature estimates are accurate within 0.64 K and mass flow...