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Keywords: nanochannels
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Heat Mass Transfer. May 2012, 134(5): 051012.
Published Online: April 13, 2012
... the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely...