This paper develops a novel standing surface acoustic wave (SAW) device with three pairs of interdigital transducers (IDTs) to fabricate the patterned microstructure arrays with the assistance of ultraviolet (UV) polymerization. The working principle, structural design, and fabrication of the SAW device are presented. Then, experimental setup was conducted to investigate the fabrication process and method of the patterned microstructure arrays on a thin photosensitive polymer surface. By adjusting the working wavelength and input voltage and selecting the pairs of IDTs, several types of patterned microstructure arrays, such as linear and latticed undulate with different surface morphologies, could be fabricated. For the application of the microstructure arrays, L929 mouse fibroblasts are cultured on the surface with linear undulate microstructure arrays. Preliminary results showed that the cells aligned well with the direction of the patterned surface and the array can enhance the cell culturing. Therefore, using the developed SAW device with the assistance of UV polymerization is an effective method to fabricate the patterned microstructure arrays, which may have great potential in the applications of biomedical and/or microelectronic fields.
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June 2018
This article was originally published in
Journal of Micro and Nano-Manufacturing
Research-Article
Patterned Microstructure Array Fabrication by Using a Novel Standing Surface Acoustic Wave Device
Yancheng Wang,
Yancheng Wang
Mem. ASME
State Key Laboratory of Fluid Power
and Mechatronic Systems,
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: yanchwang@zju.edu.cn
State Key Laboratory of Fluid Power
and Mechatronic Systems,
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: yanchwang@zju.edu.cn
Search for other works by this author on:
Dai Xue,
Dai Xue
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: xuedai@zju.edu.cn
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: xuedai@zju.edu.cn
Search for other works by this author on:
Deqing Mei
Deqing Mei
State Key Laboratory of Fluid Power
and Mechatronic Systems,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: meidq_127@zju.edu.cn
and Mechatronic Systems,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: meidq_127@zju.edu.cn
Search for other works by this author on:
Yancheng Wang
Mem. ASME
State Key Laboratory of Fluid Power
and Mechatronic Systems,
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: yanchwang@zju.edu.cn
State Key Laboratory of Fluid Power
and Mechatronic Systems,
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: yanchwang@zju.edu.cn
Dai Xue
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: xuedai@zju.edu.cn
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: xuedai@zju.edu.cn
Deqing Mei
State Key Laboratory of Fluid Power
and Mechatronic Systems,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: meidq_127@zju.edu.cn
and Mechatronic Systems,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: meidq_127@zju.edu.cn
1Corresponding author.
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received September 19, 2017; final manuscript received November 20, 2017; published online December 26, 2017. Editor: Jian Cao.
J. Micro Nano-Manuf. Jun 2018, 6(2): 021002 (7 pages)
Published Online: December 26, 2017
Article history
Received:
September 19, 2017
Revised:
November 20, 2017
Citation
Wang, Y., Xue, D., and Mei, D. (December 26, 2017). "Patterned Microstructure Array Fabrication by Using a Novel Standing Surface Acoustic Wave Device." ASME. J. Micro Nano-Manuf. June 2018; 6(2): 021002. https://doi.org/10.1115/1.4038675
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