This paper presents graphene growth on Pt thin films deposited with four different adhesion layers: Ti, Cr, Ta, and Ni. During the graphene growth at 1000 °C using conventional chemical vapor deposition (CVD) method, these adhesion layers diffuse into and alloy with Pt layer resulting in graphene to grown on different alloys. This means that each different adhesion layers induce a different quality and number of layer(s) of graphene grown on the Pt thin film. This paper presents the feasibility of graphene growth on Pt thin films with various adhesion layers and the obstacles needed to overcome in order to enhance graphene transfer from Pt thin films. Therefore, this paper addresses one of the major difficulties of graphene growth and transfer to the implementation of graphene in nano/micro-electromechanical systems (NEMS/MEMS) devices.
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June 2018
This article was originally published in
Journal of Micro and Nano-Manufacturing
Technical Briefs
Graphene Growth on and Transfer From Platinum Thin Films
Joon Hyong Cho,
Joon Hyong Cho
Mechanical Engineering Department,
The University of Texas at Austin,
Austin, TX 78712
e-mail: joonyboy@utexas.edu
The University of Texas at Austin,
Austin, TX 78712
e-mail: joonyboy@utexas.edu
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Michael Cullinan
Michael Cullinan
Mechanical Engineering Department,
The University of Texas at Austin,
Austin, TX 78712
e-mail: michael.cullinan@austin.utexas.edu
The University of Texas at Austin,
Austin, TX 78712
e-mail: michael.cullinan@austin.utexas.edu
Search for other works by this author on:
Joon Hyong Cho
Mechanical Engineering Department,
The University of Texas at Austin,
Austin, TX 78712
e-mail: joonyboy@utexas.edu
The University of Texas at Austin,
Austin, TX 78712
e-mail: joonyboy@utexas.edu
Michael Cullinan
Mechanical Engineering Department,
The University of Texas at Austin,
Austin, TX 78712
e-mail: michael.cullinan@austin.utexas.edu
The University of Texas at Austin,
Austin, TX 78712
e-mail: michael.cullinan@austin.utexas.edu
1Corresponding author.
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received September 27, 2017; final manuscript received November 21, 2017; published online December 26, 2017. Editor: Jian Cao.
J. Micro Nano-Manuf. Jun 2018, 6(2): 024501 (5 pages)
Published Online: December 26, 2017
Article history
Received:
September 27, 2017
Revised:
November 21, 2017
Citation
Cho, J. H., and Cullinan, M. (December 26, 2017). "Graphene Growth on and Transfer From Platinum Thin Films." ASME. J. Micro Nano-Manuf. June 2018; 6(2): 024501. https://doi.org/10.1115/1.4038676
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