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Journal Articles

Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning

Huimin Zhou, Yingchun Jiang, Changhong Ke, Jia Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2022, 10(2): 021005.
Paper No: JMNM-22-1031
https://doi.org/10.1115/1.4056731
Published Online: February 1, 2023
View Articletitled, Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning
Open the PDF for Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning in another window
Topics: Atomic force microscopy, Electric fields, Lithography, Vibration, Nanolithography
Journal Articles

Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes

Huimin Zhou, Yingchun Jiang, Christopher M. Dmuchowski, Changhong Ke, Jia Deng
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2022, 10(1): 011001.
Paper No: JMNM-21-1055
https://doi.org/10.1115/1.4054316
Published Online: April 28, 2022
View Articletitled, Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes
Open the PDF for Electric-Field-Assisted Contact Mode Atomic Force Microscope-Based Nanolithography With Low Stiffness Conductive Probes in another window
Topics: Atomic force microscopy, Electric fields, Lithography, Nanolithography, Probes, Resolution (Optics), Stiffness, Polymer films, Polymers, Fundamental forces (Physics)
Includes: Supplementary data
Journal Articles

A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning

E. B. Brousseau, S. Thiery, B. Arnal, E. Nyiri, O. Gibaru, J. R. Mayor
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2017, 5(4): 041003.
Paper No: JMNM-17-1006
https://doi.org/10.1115/1.4037694
Published Online: September 28, 2017
View Articletitled, A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning
Open the PDF for A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning in another window
Topics: Atomic force microscopy, Computer-aided design, Errors, Machining, Manufacturing, Computer software, Instrumentation
Journal Articles

Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry

Jonas Skovlund Madsen, Poul Erik Hansen, Pierre Boher, Deepak Dwarakanath, Jan Friis Jørgensen, Brian Bilenberg, Jesper Nygård, Morten Hannibal Madsen
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2017, 5(3): 031005.
Paper No: JMNM-16-1073
https://doi.org/10.1115/1.4036889
Published Online: June 7, 2017
View Articletitled, Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
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Topics: Atomic force microscopy, Diffraction, Diffraction gratings, Imaging, Lenses (Optics), Microscopes, Wavelength
Journal Articles

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Tsung-Fu Yao, Andrew Duenner, Michael Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2017, 5(1): 011001.
Paper No: JMNM-16-1036
https://doi.org/10.1115/1.4034634
Published Online: November 9, 2016
View Articletitled, In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism
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Topics: Atomic force microscopy, Bending (Stress), Design, Semiconductor wafers, Nanomanufacturing, Inspection, Kinematics
Journal Articles

Tip-Based Nanomanufacturing of Nanofluidics Using Atomic Force Microscopy

Rapeepan Promyoo, Hazim El-Mounayri, Mangilal Agarwal, Varun Kumar Karingula, Kody Varahramyan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2016, 4(4): 041003.
Paper No: JMNM-16-1024
https://doi.org/10.1115/1.4034608
Published Online: October 10, 2016
View Articletitled, Tip-Based Nanomanufacturing of Nanofluidics Using Atomic Force Microscopy
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Topics: Atomic force microscopy, Manufacturing, Microchannels, Nanofluidics, Nanomanufacturing, Lithography
Journal Articles

Investigations Into Superhydrophobicity of a Soot Surface Attributed to Nano-Asperities

Rahul Ramachandran, Madhu Seetharaman, N. N. Sharma
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. March 2013, 1(1): 014502.
Paper No: JMNM-12-1023
https://doi.org/10.1115/1.4023288
Published Online: March 22, 2013
View Articletitled, Investigations Into Superhydrophobicity of a Soot Surface Attributed to Nano-Asperities
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Topics: Adhesion, Atomic force microscopy, Soot, Surface roughness, Water, Glass, Drops