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Journal Articles

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Raul M. Lema Galindo, Paras Ajay, S. V. Sreenivasan

Publisher: ASME

J. Micro Nano-Manuf. September 2022, 10(3): 031001.

Paper No: JMNM-22-1035

https://doi.org/10.1115/1.4062167

Published Online: April 3, 2023

View Article titled, Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

Topics: Catalysts, Etching, Metals, Silicon, Nanoscale phenomena

Includes: Supplementary data

Journal Articles

An Investigation of Integrated Multiscale Three-Dimensional Printing for Hierarchical Structures Fabrication

Xiangjia Li, Tommaso Baldacchini, Yong Chen

Publisher: ASME

J. Micro Nano-Manuf. December 2021, 9(4): 041005.

Paper No: JMNM-21-1056

https://doi.org/10.1115/1.4054317

Published Online: April 27, 2022

View Article titled, An Investigation of Integrated Multiscale Three-Dimensional Printing for Hierarchical Structures Fabrication

Topics: Additive manufacturing, Design, Manufacturing, Mask image projection stereolithography, Microscale devices, Nanoscale phenomena, Printing, Production planning, Polymerization, Photons

Journal Articles

Kinematic Design of Functional Nanoscale Mechanisms From Molecular Primitives

Meysam T. Chorsi, Pouya Tavousi, Caitlyn Mundrane, Vitaliy Gorbatyuk, Kazem Kazerounian, Horea Ilies

Publisher: ASME

J. Micro Nano-Manuf. June 2021, 9(2): 021005.

Paper No: JMNM-21-1014

https://doi.org/10.1115/1.4051472

Published Online: July 9, 2021

View Article titled, Kinematic Design of Functional Nanoscale Mechanisms From Molecular Primitives

Topics: Design, Kinematics, Nanoscale phenomena, Molecular machines, Linkages

Journal Articles

Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Changlin Liu, Jianning Chu, Jinyang Ke, Xiao Chen, Jianguo Zhang, Junfeng Xiao, Jianfeng Xu

Publisher: ASME

J. Micro Nano-Manuf. June 2021, 9(2): 021002.

Paper No: JMNM-20-1029

https://doi.org/10.1115/1.4050969

Published Online: May 10, 2021

View Article titled, Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Topics: Cutting, Molecular dynamics, Silicon, Simulation, Wear, Diamond tools, Nanoscale phenomena

Journal Articles

Investigations for Enhancing Wear Properties of Rapid Tooling by Reinforcement of Nanoscale Fillers for Grinding Applications

Kamaljit Singh Boparai, Rupinder Singh

Publisher: ASME

J. Micro Nano-Manuf. June 2018, 6(2): 021004.

Paper No: JMNM-17-1029

https://doi.org/10.1115/1.4039031

Published Online: February 14, 2018

View Article titled, Investigations for Enhancing Wear Properties of Rapid Tooling by Reinforcement of Nanoscale Fillers for Grinding Applications

Topics: Fillers (Materials), Friction, Grinding, Nanoscale phenomena, Nylon fabrics, Rapid tooling, Stress, Wear, Temperature, Particulate matter

Journal Articles

Fabrication of a Micro/Nanofluidic Platform Via Three-Axis Robotic Dispensing System

Hanwen Yuan, Scott D. Cambron, Mark M. Crain, Robert S. Keynton

Publisher: ASME

J. Micro Nano-Manuf. December 2016, 4(4): 041005.

Paper No: JMNM-16-1026

https://doi.org/10.1115/1.4034611

Published Online: October 10, 2016

View Article titled, Fabrication of a Micro/Nanofluidic Platform Via Three-Axis Robotic Dispensing System

Topics: Electroporation, Fibers, Manufacturing, Molding, Nanofluidics, Photolithography, Plasma desorption mass spectrometry, Robotics, Nanoscale phenomena, Design

Journal Articles

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Shrawan Singhal, Michelle A. Grigas, S. V. Sreenivasan

Publisher: ASME

J. Micro Nano-Manuf. September 2016, 4(3): 031004.

Paper No: JMNM-16-1008

https://doi.org/10.1115/1.4033742

Published Online: July 1, 2016

View Article titled, Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Topics: Particulate matter, Contamination, Nanofabrication, Film thickness, Deformation, Nanoscale phenomena, Nanomanufacturing

Journal Articles

Three-Dimensional Printing of Nanoscale Powders Using Laser Shockwaves

P. A. Molian

Publisher: ASME

J. Micro Nano-Manuf. December 2015, 3(4): 041006.

Paper No: JMNM-15-1039

https://doi.org/10.1115/1.4031462

Published Online: September 22, 2015

View Article titled, Three-Dimensional Printing of Nanoscale Powders Using Laser Shockwaves

Topics: Lasers, Shock waves, Sintering, Diamonds, Shock (Mechanics), Additive manufacturing, Nanoscale phenomena, Particulate matter

Journal Articles

Design of a Compact Biaxial Tensile Stage for Fabrication and Tuning of Complex Micro- and Nano-scale Wrinkle Patterns

Sourabh K. Saha, Martin L. Culpepper

Publisher: ASME

J. Micro Nano-Manuf. December 2015, 3(4): 041004.

Paper No: JMNM-14-1077

https://doi.org/10.1115/1.4031382

Published Online: September 14, 2015

View Article titled, Design of a Compact Biaxial Tensile Stage for Fabrication and Tuning of Complex Micro- and Nano-scale Wrinkle Patterns

Topics: Design, Manufacturing, Plasma desorption mass spectrometry, Plasmas (Ionized gases), Thin films, Nanoscale phenomena

Journal Articles

Laser-Energized Plasmonics for Nanopatterning Medical Devices

P. A. Molian

Publisher: ASME

J. Micro Nano-Manuf. September 2015, 3(3): 031003.

Paper No: JMNM-15-1004

https://doi.org/10.1115/1.4030680

Published Online: September 1, 2015

View Article titled, Laser-Energized Plasmonics for Nanopatterning Medical Devices

Topics: Laser ablation, Lasers, Medical devices, Nanomanufacturing, Stents, Nanoscale phenomena, Plasmons (Physics)

Journal Articles

A Coupled Electromagnetic and Thermal Model for Picosecond and Nanometer Scale Plasmonic Lithography Process

Ion-Hong Chao, Liang Pan, Cheng Sun, Xiang Zhang, Adrienne S. Lavine

Publisher: ASME

J. Micro Nano-Manuf. September 2014, 2(3): 031003.

Paper No: JMNM-14-1011

https://doi.org/10.1115/1.4027589

Published Online: July 8, 2014

View Article titled, A Coupled Electromagnetic and Thermal Model for Picosecond and Nanometer Scale Plasmonic Lithography Process

Topics: Electric fields, Lasers, Lithography, Waves, Ultraviolet radiation, Computer simulation, Heat, Nanoscale phenomena, Heat transfer

Journal citation

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Supplemental Material

Simultaneous Micro- and Nanoscale Silicon Fabrication by Metal-Assisted Chemical Etch

An Investigation of Integrated Multiscale Three-Dimensional Printing for Hierarchical Structures Fabrication

Kinematic Design of Functional Nanoscale Mechanisms From Molecular Primitives

Molecular Dynamic Simulation of Micro-Structured Diamond Tool in Silicon Carbide Cutting

Investigations for Enhancing Wear Properties of Rapid Tooling by Reinforcement of Nanoscale Fillers for Grinding Applications

Fabrication of a Micro/Nanofluidic Platform Via Three-Axis Robotic Dispensing System

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Three-Dimensional Printing of Nanoscale Powders Using Laser Shockwaves

Design of a Compact Biaxial Tensile Stage for Fabrication and Tuning of Complex Micro- and Nano-scale Wrinkle Patterns

Laser-Energized Plasmonics for Nanopatterning Medical Devices

A Coupled Electromagnetic and Thermal Model for Picosecond and Nanometer Scale Plasmonic Lithography Process

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