1-3 of 3
Guanghui Fu
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles

Direct Evaluation of Pressure Distribution of Frictionless Axisymmetric Indentation Problems

Guanghui Fu
Journal: Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Briefs
J. Appl. Mech. September 2008, 75(5): 054502.
https://doi.org/10.1115/1.2913000
Published Online: July 17, 2008
View Article titled, Direct Evaluation of Pressure Distribution of Frictionless Axisymmetric Indentation Problems
Open the PDF for Direct Evaluation of Pressure Distribution of Frictionless Axisymmetric Indentation Problems in another window
Topics: Pressure, Shapes, Elasticity, Computer software, Elastic half space
Proceedings Papers

An Analytical Dishing and Step Height Reduction Model for Chemical Mechanical Planarization (CMP)

Guanghui Fu, Abhijit Chandra
Proc. ASME. IMECE2002, Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology, 85-88, November 17–22, 2002
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2002-39276
https://doi.org/10.1115/IMECE2002-39276
View Paper titled, An Analytical Dishing and Step Height Reduction Model for Chemical Mechanical Planarization (CMP)
Open the PDF for An Analytical Dishing and Step Height Reduction Model for Chemical Mechanical Planarization (CMP) in another window
Topics: Copper, Density, Design, Geometry, Polishing, Pressure, Semiconductor wafers, Slurries, Spectral linewidth, Stiffness
Journal Articles

An Extension of Hertz’s Theory in Contact Mechanics

Guanghui Fu
Journal: Journal of Applied Mechanics
Publisher: ASME
Article Type: Technical Briefs
J. Appl. Mech. March 2007, 74(2): 373–374.
https://doi.org/10.1115/1.2188017
Published Online: January 20, 2006
View Article titled, An Extension of Hertz’s Theory in Contact Mechanics
Open the PDF for An Extension of Hertz’s Theory in Contact Mechanics in another window
Topics: Contact mechanics, Elasticity, Polynomials, Pressure, Stress