Tribological properties are crucial to the reliability of microelectromechanical systems/nanoelectromechanical systems (MEMS/NEMS). In this study, adhesion and friction measurements are made at micro and nanoscales on single-crystal silicon (commonly used in MEMS/NEMS) and hydrophobic and low friction films. These include diamondlike carbon (DLC), chemically bonded perfluoropolyether (PFPE), and self-assembled monolayer (SAM) films. Since MEMS/NEMS devices are expected to be used in various environments, measurements are made at a range of velocities, humidities, and temperatures. The relevant adhesion and friction mechanisms are discussed. It is found that solid films of DLC, PFPE, and SAM can reduce the adhesion and friction of silicon. These films can be used as anti-adhesion films for MEMS/NEMS components under different environments and operating conditions. Finally, the adhesion and friction data clearly show scale dependence. The scale effects on adhesion and friction are also discussed in the paper.
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e-mail: bhushan.2@osu.edu
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July 2004
Technical Papers
Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects
Bharat Bhushan, Fellow ASME,
e-mail: bhushan.2@osu.edu
Bharat Bhushan, Fellow ASME
Nanotribology Laboratory for Information, Storage and MEMS/NEMS, The Ohio State University, 206 W 18th Avenue, Columbus, OH 43210-1107
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Huiwen Liu,
Huiwen Liu
Nanotribology Laboratory for Information, Storage and MEMS/NEMS, The Ohio State University, 206 W 18th Avenue, Columbus, OH 43210-1107
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Stephen M. Hsu
Stephen M. Hsu
National Institute of Standards and Technology, Gaithersburg, MD 20899
Search for other works by this author on:
Bharat Bhushan, Fellow ASME
Nanotribology Laboratory for Information, Storage and MEMS/NEMS, The Ohio State University, 206 W 18th Avenue, Columbus, OH 43210-1107
e-mail: bhushan.2@osu.edu
Huiwen Liu
Nanotribology Laboratory for Information, Storage and MEMS/NEMS, The Ohio State University, 206 W 18th Avenue, Columbus, OH 43210-1107
Stephen M. Hsu
National Institute of Standards and Technology, Gaithersburg, MD 20899
Contributed by the Tribology Division for publication in the ASME JOURNAL OF TRIBOLOGY. Manuscript received by the Tribology Division August 6, 2003; revised manuscript received October 17, 2003. Associate Editor: J. A. Tichy.
J. Tribol. Jul 2004, 126(3): 583-590 (8 pages)
Published Online: June 28, 2004
Article history
Received:
August 6, 2003
Revised:
October 17, 2003
Online:
June 28, 2004
Citation
Bhushan, B., Liu, H., and Hsu, S. M. (June 28, 2004). "Adhesion and Friction Studies of Silicon and Hydrophobic and Low Friction Films and Investigation of Scale Effects ." ASME. J. Tribol. July 2004; 126(3): 583–590. https://doi.org/10.1115/1.1739407
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