The natural frequency and responses of a micro-electro-mechanical system (MEMS) with time-varying capacitors are determined under an equivalent direct current (DC) voltage. Under alternating current (AC) voltages, the resonant condition and the corresponding resonant motion possessing a wide energy band for such a system are investigated because the motion with the wide energy band is very easily sensed. For a given voltage strength, the AC frequency band is obtained for chaotic resonant motions in the specific resonant layer. The numerical and analytical predictions of such a motion are in a acceptable agreement, and the dynamic model provides the range prediction of the alternating current and voltage on the capacitor agreeing with experimental measurements. The lower-order resonant motion has a higher energy than the higher-order resonant motions, which indicates that the lower-order resonant motion can be easily sensed. Although this model is developed from a specified MEMS, the analysis and results can be applied to other dynamic systems.
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January 2004
Technical Papers
Nonlinear Dynamics of a Micro-Electro-Mechanical System With Time-Varying Capacitors
Albert C. J. Luo, Mem. ASME,
Albert C. J. Luo, Mem. ASME
Department of Mechanical and Industrial Engineering, Southern Illinois University Edwardsville, Edwardsville, IL 62026-1805
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Fei-Yue Wang
Fei-Yue Wang
BEI Technologies Inc., 2700 Systron Drive, Concord, CA 94518
Search for other works by this author on:
Albert C. J. Luo, Mem. ASME
Department of Mechanical and Industrial Engineering, Southern Illinois University Edwardsville, Edwardsville, IL 62026-1805
Fei-Yue Wang
BEI Technologies Inc., 2700 Systron Drive, Concord, CA 94518
Contributed by the Technical Committee on Vibration and Sound for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received June 2002; Revised April 2003. Associate Editor: J. P. Cusumano.
J. Vib. Acoust. Jan 2004, 126(1): 77-83 (7 pages)
Published Online: February 26, 2004
Article history
Received:
June 1, 2002
Revised:
April 1, 2003
Online:
February 26, 2004
Citation
Luo, A. C. J., and Wang, F. (February 26, 2004). "Nonlinear Dynamics of a Micro-Electro-Mechanical System With Time-Varying Capacitors ." ASME. J. Vib. Acoust. January 2004; 126(1): 77–83. https://doi.org/10.1115/1.1597211
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